Definition from Wiktionary, the free dictionary
Abbreviation [please replace this header]
- Tetrakis-Dimethylamino-Germane, the metalorganic source for Germanium Nitride (GeN) in MOCVD of semiconductors. It grows GeN instead of Ge, and is used at either high temperatures (600-800 C) or with plasma because of its very low vapor pressure and higher decomposition temperature. Also known as TDMAGe and pronounced as T-Damage.