nanotrenches

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English

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Noun

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nanotrenches

  1. plural of nanotrench
    • 2016, Feng Xiong, Sanchit Deshmukh, Sungduk Hong, Yuan Dai, Ashkan Behnam, Feifei Lian, Eric Pop, “SANTA: Self-Aligned Nanotrench Ablation via Joule Heating for Probing Sub-20 nm Devices”, in arXiv[1]:
      We achieve sub-20 nm nanotrenches for the first time, by lowering the ambient temperature and reducing the PMMA thickness.