salicide

English

Pronunciation

• (UK) IPA^(key): /ˈsalɪˌsaɪd/
• (US) IPA^(key): /ˈsælɪˌsaɪd/

Etymology 1

salicin +‎ -ide

Noun

salicide (plural salicides)

1. (chemistry) A compound of salicin e.g. salicide of potassium, hydrogen salicide

Etymology 2

Blend of self +‎ aligned +‎ silicide

Noun

salicide (plural salicides)

1. (silicon microelectronics) An electrical contact made from a silicide whose formation does not require lithographic patterning processes, i.e. it is "self-aligned"
   • 1983 November 11, T. Paul Chow, Andrew J. Steckl, “Refractory Metal Silicides: Thin-Film Properties and Processing Technology”, in IEEE Trans. on Electron Devices‎^[1], volume ED-30, number 11, November 1983, pages 1480–1497:

     Composite: Self-aligned silicide/poly Si gate (salicide) (label on Figure 7d)

   • 1993, Khalid Sheergar, Platinum salicide process for BiCMOS applications, thesis‎^[2], Carleton University:

     Platinum salicide process for BiCMOS applications

   • 1995, Wlodek Kaplan, Titanium SALICIDE Process for VLSI Device Application‎^[3], Royal Institute of Technology:

     Titanium SALICIDE Process for VLSI Device Application

   • 2007, T. Yamaguchi et al., A Novel Low Leakage-Current Ni SALICIDE Process in nMOSFETs on Si(110) Substrate‎^[4], 2007 IEEE International Electron Devices Meeting:

     A Novel Low Leakage-Current Ni SALICIDE Process in nMOSFETs on Si(110) Substrate

   • 2010, Yi-Wei Chen et al., Advances on NiPt SALICIDE process optimization for 28nm CMOS manufacturing‎^[5], 2010 International Symposium on Semiconductor Manufacturing (ISSM):

     Advances on NiPt SALICIDE process optimization for 28nm CMOS manufacturing

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