octafluorocyclobutane
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English[edit]
Etymology[edit]
octa- + fluoro- + cyclobutane
Noun[edit]
octafluorocyclobutane (uncountable)
- The organofluorine compound C4F8, related to cyclobutane by replacement of all C–H bonds with C–F bonds, and used as a deposition gas and etchant in semiconductor manufacture.